semget: no space left on freebsd 6.2

[Jordi Moles Blanco]

hello everyone,

i'm having some trouble with a freebsd 6.2 box and apache-2.0.59.  When 
i try to install some apache_mods, i get this:

For example with mod_cband:

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apache2_mod_cband: cannot create shared memory segment for remote hosts
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when i debug this, i get to the point where kernel says:

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semget: No space left on device
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It doesn't happen with all apache2_mods, but with a few, for example 
mod_cband and mod_tsunami.

i've googled a lot and found some people with the same problem but with 
apache 1.3.x. Their fix doesn't work in my box. They have tried this:

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ipcs -s | grep nobody | perl -e 'while (<STDIN>) {
@a=split(/\s+/); print `ipcrm sem $a[1]`}'

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but it doesn't work for me.
i also found this:

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Also try adding this options on FreeBSD kernel config:
options         SEMMNI=20
options         SEMMNS=120

And set the kern.maxfiles sysctl option higher than 1000.

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it didn't work either.

do you have any idea where the problem is? Thanks.