Problem building world

Dear all,

when trying to build world as of today, the following happens:

>>> stage 3: cross tools
--------------------------------------------------------------
cd /usr/home/tuexen/freebsd-src; time env INSTALL="sh /usr/home/tuexen/freebsd-src/tools/install.sh"  TOOLS_PREFIX=/usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp  PATH=/usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/legacy/usr/sbin:/usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/legacy/usr/bin:/usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/legacy/bin:/usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/legacy/usr/libexec:/sbin:/bin:/usr/sbin:/usr/bin  WORLDTMP=/usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp  MAKEFLAGS="-m /usr/home/tuexen/freebsd-src/tools/build/mk  -j 4 -J 15,16 -m /usr/home/tuexen/freebsd-src/share/mk" make  -f Makefile.inc1  DESTDIR=  OBJTOP='/usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools'  OBJROOT='${OBJTOP}/'  MAKEOBJDIRPREFIX=  BOOTSTRAPPING=1400029  BWPHASE=cross-tools  -DNO_CPU_CFLAGS  -DNO_LINT  -DNO_PIC  -DNO_SHARED  MK_ASAN=no  MK_CTF=no  MK_CLANG_EXTRAS=no  MK_CLANG_FORMAT=no  MK_CLANG_FULL=no  MK_HTML=no  MK_MAN=no  MK_PROFILE=no  MK_RETPOLINE=no  MK_SSP=no  MK_TESTS=no  MK_UBSAN=no  MK_WERROR=no  MK_INCLUDES=yes  MK_MAN_UTILS=yes MK_LLVM_TARGET_ALL=no  TARGET=riscv TARGET_ARCH=riscv64  MK_CLANG_IS_CC=yes  MK_LLDB=no  MK_LLVM_BINUTILS=no  MK_TESTS=no cross-tools
--- cross-tools ---
===> lib/clang (obj,all,install)
--- all_subdir_lib/clang/libllvm ---
===> lib/clang/libllvm (all)
[Creating objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Analysis...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/AsmParser...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/BinaryFormat...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Bitcode/Reader...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Bitcode/Writer...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Bitstream/Reader...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/CodeGen...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/CodeGen/AsmPrinter...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/CodeGen/GlobalISel...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/CodeGen/LiveDebugValues...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/CodeGen/SelectionDAG...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/DebugInfo/CodeView...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/DebugInfo/DWARF...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/DebugInfo/MSF...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/DebugInfo/Symbolize...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Demangle...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Frontend/OpenMP...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/IR...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/IRReader...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/LTO...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Linker...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/MC...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/MC/MCDisassembler...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/MC/MCParser...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Object...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/ObjectYAML...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Option...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Passes...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/ProfileData...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/ProfileData/Coverage...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Remarks...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Support...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/TableGen...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Target...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Target/RISCV...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Target/RISCV/AsmParser...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Target/RISCV/Disassembler...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Target/RISCV/MCTargetDesc...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Target/RISCV/TargetInfo...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/TextAPI...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/ToolDrivers/llvm-dlltool...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/ToolDrivers/llvm-lib...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Transforms/AggressiveInstCombine...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Transforms/CFGuard...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Transforms/Coroutines...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Transforms/IPO...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Transforms/InstCombine...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Transforms/Instrumentation...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Transforms/ObjCARC...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Transforms/Scalar...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Transforms/Utils...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/Transforms/Vectorize...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/llvm-dlltool...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/llvm-lib...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/llvm/Frontend/OpenMP...]
[Creating nested objdir /usr/obj/usr/home/tuexen/freebsd-src/riscv.riscv64/tmp/obj-tools/lib/clang/libllvm/llvm/IR...]
--- llvm/Frontend/OpenMP/OMP.h.inc ---
--- llvm/Frontend/OpenMP/OMP.inc ---
--- llvm/IR/IntrinsicImpl.inc ---
--- llvm/IR/IntrinsicsAArch64.h ---
--- llvm/Frontend/OpenMP/OMP.h.inc ---
llvm-tblgen --gen-directive-decl  -I /usr/home/tuexen/freebsd-src/contrib/llvm-project/llvm/include -d llvm/Frontend/OpenMP/OMP.h.inc.d -o llvm/Frontend/OpenMP/OMP.h.inc  /usr/home/tuexen/freebsd-src/contrib/llvm-project/llvm/include/llvm/Frontend/OpenMP/OMP.td
ELF binary type "0" not known.
--- llvm/Frontend/OpenMP/OMP.inc ---
llvm-tblgen --gen-directive-impl  -I /usr/home/tuexen/freebsd-src/contrib/llvm-project/llvm/include -d llvm/Frontend/OpenMP/OMP.inc.d -o llvm/Frontend/OpenMP/OMP.inc  /usr/home/tuexen/freebsd-src/contrib/llvm-project/llvm/include/llvm/Frontend/OpenMP/OMP.td
--- llvm/IR/IntrinsicImpl.inc ---
llvm-tblgen -gen-intrinsic-impl  -I /usr/home/tuexen/freebsd-src/contrib/llvm-project/llvm/include -d llvm/IR/IntrinsicImpl.inc.d -o llvm/IR/IntrinsicImpl.inc  /usr/home/tuexen/freebsd-src/contrib/llvm-project/llvm/include/llvm/IR/Intrinsics.td
--- llvm/IR/IntrinsicsAArch64.h ---
llvm-tblgen -gen-intrinsic-enums -intrinsic-prefix=aarch64  -I /usr/home/tuexen/freebsd-src/contrib/llvm-project/llvm/include -d llvm/IR/IntrinsicsAArch64.h.d -o llvm/IR/IntrinsicsAArch64.h  /usr/home/tuexen/freebsd-src/contrib/llvm-project/llvm/include/llvm/IR/Intrinsics.td
ELF binary type "0" not known.
--- llvm/IR/IntrinsicImpl.inc ---
sh: llvm-tblgen: Exec format error
ELF binary type "0" not known.
--- llvm/Frontend/OpenMP/OMP.inc ---
sh: llvm-tblgen: Exec format error
--- llvm/IR/IntrinsicsAArch64.h ---
sh: llvm-tblgen: Exec format error
ELF binary type "0" not known.
--- llvm/IR/IntrinsicImpl.inc ---
*** [llvm/IR/IntrinsicImpl.inc] Error code 126

make[4]: stopped in /usr/home/tuexen/freebsd-src/lib/clang/libllvm
--- llvm/Frontend/OpenMP/OMP.inc ---
*** [llvm/Frontend/OpenMP/OMP.inc] Error code 126

make[4]: stopped in /usr/home/tuexen/freebsd-src/lib/clang/libllvm
--- llvm/IR/IntrinsicsAArch64.h ---
*** [llvm/IR/IntrinsicsAArch64.h] Error code 126

make[4]: stopped in /usr/home/tuexen/freebsd-src/lib/clang/libllvm
--- llvm/Frontend/OpenMP/OMP.h.inc ---
sh: llvm-tblgen: Exec format error
*** [llvm/Frontend/OpenMP/OMP.h.inc] Error code 126

make[4]: stopped in /usr/home/tuexen/freebsd-src/lib/clang/libllvm
4 errors

make[4]: stopped in /usr/home/tuexen/freebsd-src/lib/clang/libllvm

make[3]: stopped in /usr/home/tuexen/freebsd-src/lib/clang

make[2]: stopped in /usr/home/tuexen/freebsd-src
      12.89 real        11.86 user         1.14 sys

make[1]: stopped in /usr/home/tuexen/freebsd-src

Any idea what is going wrong?

Best regards
Michael